Myfab

 Realize your nano vision
John Halonen

     John Halonen

Processing competence: Opto device processing

Tel: +46 31 772 83 99

Mobile: +46 73 034 63 63

List of tools where John Halonen is tool responsible

 NameTypeTool Id
DetailsSurface profiler - Tencor P15Surface profilometer108
DetailsWet Bench - Acid & Base - Developer Spinner - OsirisWet bench204
DetailsMask aligner - Suss MA/BA 6 #1Mask aligner205
DetailsWet Bench - Acid & Base - Developer WorkWet bench208
DetailsMask aligner - Suss MJB3 UV 400 #1Mask aligner210
DetailsSpinner - BLESpinncoater218
DetailsSpinner - Suss LabSpin6Wet bench220
DetailsSurface profiler - Tencor AS500 #2Surface profilometer232
DetailsWet Bench - Hotplate & HMDS & OvenHot plate260
DetailsMask aligner - Suss MJB3 UV 400 #2Mask aligner268
DetailsFurnace - Wet oxidationFurnace411
DetailsSpinner - Suss LabSpin6Spinncoater/Hotplate501
DetailsWet Bench - Solvent - Mask cleaningWet bench505
DetailsWet Bench - Solvent - Ultrasonic bath - Microwave lineUltrasonic cleaning531
DetailsWet Bench - Acid & Base - Developer Bath - Microwave lineWet bench532
DetailsWet Bench - Acid & Base - Developer Work - Microwave lineWet bench533
DetailsSpinner - BLE & HMDS hotplate - Microwave lineSpinncoater534
DetailsHotplate - Solar-semi & BLE - Microwave lineHot plate535
DetailsWet bench Acid & Base - Developer workWet bench627
DetailsSolar-Semi Hot PlateWet bench629
DetailsSpinner - Suss LabSpin6Spinncoater1116
DetailsMask aligner - Suss MA 6 #2Mask aligner213
DetailsScriber breaker - LoomisScribing/cleaving1013
DetailsFlood exposure - Bachur & Associates - DUV 261
DetailsSpinner - Suss RCD8 209
DetailsHotplate - Wenesco - SU8/BCB 247
DetailsWafer Expander - Dynatex 1017
DetailsMaskless lithography - SmartPrint 1121
DetailsLaminator for SUEX Dry Film Photoresist 518
DetailsDeveloper Spinner - Osiris UNIXX 274