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Electrum Quality Manual

Emergency info

New/updated documents

Preparation

- Lab introduction (doc)

- New customers

- Planning of experiments

Processing

- Facility maintenance

- Quality system

- Tool maintenance

- Processing work

- Incident report

- LIMS

Conclusion/Feedback

- User feedback

- Problem reporting

- Removal of users

- Removal of tool

Infrastructure

- Responsibilities in the lab

- Cleanroom specifications

- Operation (drift)

Administration

- Quality system

- Work environment

- LIMS administration

Support

- Process monitoring

- Preventive maintenance

- Tool management

- Process recipes

- General resources

Virtual Cleanroom

KTH/RISE//User Information//Electrum Quality Manual//Responsibilities in the lab//Laboratory responsible

Laboratory responsible

Laboratory responsible

Click on heading to sort the table.

Responsibility for	Name	E-mail	University/Company	Group
RISE	Magnus Lindberg	magnus.lindberg@ri.se	RISE	Nanoelectronics
Albanova/SCI	Erik Holmgren	holmgr@kth.se	KTH	SCI
Coherent	Wlodek Kaplan	wlodek.kaplan@ascatron.com	Ascatron AB
EKT - Devices and Circuits	Per-Erik Hellström	pereh@kth.se	KTH	EKT - Devices and Circuits
FNM-microscopy	Fei Ye	feiy@kth.se	KTH	FNM - Functional Nanomaterials
HMA - Semiconductor Materials	Anand Srinivasan	anand@kth.se	KTH	HMA - Semiconductor Materials
IRnova	Henry Bleichner	henry.bleichner@ir-nova.se	IRnova
MF - Materialfysik	Oscar Tjernberg	oscar@kth.se	KTH	MF - Materialfysik
MST - Microsystem Technology	Joachim Oberhammar	joachimo@kth.se	KTH	MST - Microsystem Technology
TranSiC	Krister Gumaelius	krister.gumaelius@fairchildsemi.com	TranSiC

2023-11-17 Laboratory Director