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Electrum Quality Manual
Virtual Cleanroom
1.
Corridor
2.
Gowning room
3.
APL Centura
4.
Gul 3
5.
Q-etch
6.
Wet chemistry
7.
Epi III/V
8.
Mozart
9.
Disco saw
10.
APL-gul
11.
APL-analys
12.
APL-SiC
13.
Hybridisering
14.
ATP
15.
Plasma III/V
16.
Metal III/V
17.
Gul 1
18.
Anneal
19.
Furnace
20.
Furnace service
21.
Si-met
22.
23.
Facility
1.
Ventilation
2.
Gas delivery system
3.
Service and media
4.
Equipment installation
KTH/RISE
//
User Information
//
Virtual-Clean-Room-Tour
Virtual Clean Room Tour
Virtual Clean Room Tour
In the Virtual Clean Room you can experience research in a cleanroom without leaving your office.
Cleanroom
Facility
1.
Corridor
13.
Hybridisering
1.
Ventilation
2.
Gowning room
14.
ATP
2.
Gas delivery system
3.
APL Centura
15.
Plasma III/V
3.
Service and media
4.
Gul 3
16.
Metal III/V
4.
Equipment installation
5.
Q-etch
17.
Gul 1
6.
Wet chemistry
18.
Anneal
7.
Epi III/V
19.
Furnace
8.
Mozart
20.
Furnace-service
9.
Disco saw
21.
Si-met
10.
APL -gul
22.
11.
APL-analys
23.
12.
APL- SiC
