Metal III/V 

In the metal III/V area all kinds of metals are deposited on wafers. The metals can be deposited by evaporation or by sputtering.

The metal can be

• Aluminium (Al)
• Titan (Ti)
• Gold (Au)
• Nickel (Ni)
• ...

A evaporation system (left). Targets of different kinds for a sputter can be seen to the right.

All pictures can be viewed in larger format, just click on them.

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