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Electrum Quality Manual

Virtual Cleanroom

2. Gowning room

4. Gul 3

6. Wet chemistry

13. Hybridisering

14. ATP

15. Plasma III/V

16. Metal III/V

20. Furnace service

22.

23.

2. Gas delivery system

3. Service and media

4. Equipment installation

KTH/RISE//User Information//Virtual-Clean-Room-Tour//Q-etch

Q-etch

Q-etch

Here precision dry etching of the material defined by patterns made in the lithography rooms is done.

All pictures can be viewed in larger format, just click on them.

Return to start of Virtual Clean Room Lab Tour